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Paul McIntyre

Rick and Melinda Reed Professor in the School of Engineering

Professor of Photon Science

Professor, Stanford Synchrotron Radiation Lightsource

(650) 725-9806

ICK AND MELINDA REED PROFESSOR IN THE SCHOOL OF ENGINEERING

Education

ScD, MIT

Research Interests

We are engaged in studies of interfaces that form between deposited metal oxides and various high-quality covalent semiconductor crystals, including Si, Ge, InGaAs and GaN. Most of this work is motivated by the continued dimensional scaling of field effect transistors, which prompts interest in new high permittivity dielectric materials and new semiconductors for the transistor channel. Making interfaces with low areal densities of electronic carrier traps is essential for efficient operation of such devices. Our group studies the role of deposition conditions, process chemistry, post-deposition annealing on the stability of these oxide/semiconductor interfaces, and the defects they form. We also investigate methods for protecting semiconductor surfaces during metal oxide deposition and for post-deposition passivation of interface defects.

Publications

See Publications for Paul McIntyre